Shanghai Hanbell was established in 1996 and listed on Shenzhen A-share market in 2007. Jinan, Guangzhou, Nanjing and Chongqing branches have been set up one after another, and the subsidiaries of Zhejiang Hanson, Shanghai Comer, Hanbell HongKong, Hanbell Vietnam, Hanbell Korea and Zhejiang Comer have been set up one after another. All these reflect the achievements of HANBELL people's hard work in the past 27 years.
HANBELL PRECISE MACHINERY COMPANY 27 YEARS OF HISTORYAIMS TO OPEN
Features:
Environmental friendly new vacuum pump
Small size, low energy consumption, great cost reduction
Energy saving pump suitable for medium severe process
Application
Load Lock、、、、Etch、、、、Transfer、、Ashing、、、、Metrology、、Litho、、PVD、、、Implant
Technical Parameter | |||
Hanbell IPM | 100 | 600 | |
DP size | m3/h | 100 | 100 |
BP size | m3/h | / | 600 |
Peak speed | m3/h | 100 | 600 |
Untimate Vac | mTorr | 7.5 | 3.75 |
System power at Ult. | kw | 0.7 | 1 |
Dimension-L | mm | 720 | 720 |
Dimension-W | mm | 340 | 340 |
Dimension-H | mm | 465 | 700 |
Noise | dB(A) | 65 | 65 |
Weight | KG | 145 | 200 |
Inlet connection | ISO | 63 | 80 |
Oulter connection | NW | 25 | 25 |
Catalogue & Technical Manual
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Drawing
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